News

The is the catch all News category. All of our posts can be found under news; however, they are further categorized for ease of use.

  • Piranha Deck Down
    June 10, 2009
    The Piranha Aisle 2 wet deck is down to enable maintenance to the exhaust system.
  • Clean Room Storage Boxes
    June 2, 2009
    As part of the ongoing installation of the Alcatel AMS110, we have temporarily moved the storage boxes…
  • Pattern Generator Maintenance
    June 1, 2009
    The Heidelberg Pattern Generator will be placed offline from June 12 – 22 for routine maintenance. 
  • DUV installed on Mask Aligner #2
    May 21, 2009
    We’ve recently setup Mask Aligner #2 (Elmo) into it’s “DUV” configuration (254nm).   Normally, this system exposes subtrates…
  • E-Beam Lithography Training
    May 13, 2009
    Training for the Raith 150 EBL System has now been scheduled.
  • Did you know…
    May 7, 2009
    We have upgraded our Filmetrics thin film measurment software.
  • 24 Hour Access
    May 3, 2009
    The nanoFAB is a 24 hour, 7 day a week facility.  Equipment is available at your convenience,…
  • Oxford ICP-RIE Shutdown
    April 27, 2009
    Due to the installation process of a new DRIE tool, the Oxford ICP-RIE will be unavailable for…
  • Cleanroom HVAC Shutdown
    April 21, 2009
    On Monday April 27th, there will be no access to the cleanroom from 7:30 am until 9:00…
  • NanoFab Safety Training
    April 20, 2009
    The nanoFAB’s next Mandatory Training Course will be held on May 4, 5 and 6th from 1:00…