Kurt J. Lesker 150LX ALD system now open for training
The nanoFAB is pleased to announce that our newly installed and commissioned KJLC 150LX Atomic Layer Deposition system is now fully operational and available for training to all nanoFAB users. The ALD offers excellent uniformity and controlled growth of a variety of films on an atomic scale. Its high-vacuum load-lock and UHV-type sealing, combined with near-constant high-purity Ar flow, enable high-purity process conditions and excellent quality films.
Main system features include:
Single wafer transfer load-lock
Substrate heating up to 500 °C
150 mm platen, with an available carrier for samples <150 mm
Thermal and plasma-enhanced (PE-ALD) processes available
In situ film growth monitoring using Film Sense FS-1EX multiwavelength ellipsometer
The KJLC 150LX ALD is available to users for self-use (after training) and fee-for-service work. Any users interested in getting trained on this tool should submit a training request via LMACS. If you have any questions, please contact Aaron Hryciw (ahryciw@ualberta.ca) or Scott Munro (smunro@ualberta.ca).
nGauge AFM is now Available at nanoFAB
The nanoFAB is pleased to announce that the new Atomic Force Microscopy system, the ICSPI nGauge AFM, has been successfully installed and is operational now. This benchtop AFM allows nanoscale topography data collection with 3 easy steps: automatic sweep, approach, and scan. The nGauge AFM is a laserless system, based on a patented AFM-on-a-chip technology. In this new technology, all of the sensors and scanners of a traditional AFM have been integrated onto a single chip, so you can capture routine scans in just over a minute.
The nGauge AFM operates in the tapping mode and generates topography, phase, and error images simultaneously for any solid samples (including conductive and non-conductive, but not liquid samples). nGauge AFM tips are made of durable materials like diamond-like carbon (DLC) and aluminum oxide, which are also integrated onto the AFM chip, enabling hundreds (or thousands) of scans possible with each tip.
(a) The benchtop nGauge AFM. (b) AFM chip and its integrated components. (c) Front view of the Diamond-Like Carbon and Aluminum tips. (d) 3-step scan collection via nGauge AFM
nGauge AFM Specifications:
Max scan area: 20 x 20 μm
Z Range: 10 μm
Scan speed: 80 seconds (256 x 256 pixel, 20 x 20 μm)
Max scan resolution: 1024 x 1024 pixels (5 minutes)
Noise floor: <0.5 nm rms
XY Scanner resolution: <0.5 nm
Images: Topography, Phase, Error
Approach: Automatic
Max sample size: 100 mm x 50 mm x 16 mm
Sample: Shale (before and after ion milling processes) Sample courtesy of Graham Spray, M.Sc., P.Geo., AGAT Laboratorie.
Diamond-Like Carbon (DLC) Tip Specification:
nGauge AFM tips are made of diamond-like carbon materials with high aspect ratio offering excellent lateral resolution and excellent contamination resistance.
Tip radius: <20 nm
Tip height: >1 μm
Cone angle: <10°
Aspect ratio: >3
Tilt compensation: 15°
Tip post height: 3 μm
Tip shape: Conical
Tip material: Diamond-like carbon\
Sample: Patterned Cr + Au / Ti on Si chip
Cantilever Specifications:
nGauge AFM tips are located at the very end of the cantilever beam and are integrated onto a micro-electro-mechanical systems (MEMS) chip. The chip features integrated lateral and vertical actuators and piezoresistive sensors.
Shape: Beam
Length: 30 μm
Width: 6 μm
Thickness: 3 μm
Resonant Frequency: 8 kHz (typical: 7.3–8.7 kHz)
Stiffness: 0.1 N/m
The nGauge AFM is now available to users for both staff analysis and self-use/user training provided they purchase own nGauge AFM chip. Any users interested in getting trained on this tool or staff analysis should submit a request via LMACS. If you have any questions, please contact Dr. Nas Yousefi or Peng Li – the Characterization Group Manager.
Sample: Polymeric Membrane Sample courtesy of Dr. Sadrzadeh, Mechanical Engineering Department, Faculty of Engineering, University of Alberta.
