XPS Spectrometer (Kratos AXIS 165)

XPS Spectrometer (Kratos AXIS 165)


X-ray photoelectron spectrometer with ISS and AES capabilities, that can provide semi-quantitative compositional and chemical state information. Utilizing SEM, fine features can be positioned for analysis of nanoscale domains. Capable of handling powders and solid samples with dimensions less than 10 x13 x 4 mm, and loading up to 6 simultaneous samples. This system is also equipped with a Catalysis Transfer Chamber allowing for in-situ surface reactions and temperature control from liquid nitrogen to 800C.


  • Angle resolved High energy-resolution X-ray photoelectron spectroscopy (XPS)
  • Dual (Mg and Al) and Monochromatic (Al) X-ray sources
  • Sample processing chamber (pretreatment and catalysis cell)
  • Charge neutralization
  • Automated stage with cooling and heating options
  • Scanning Auger Electron Spectroscopy (AES)
  • Ion Scattering Spectroscopy (ISS)
  • Ion gun for depth-profiling and ISS
  • Imaging by Scanning Electron Microscopy (SEM)