Lithography Process Station 2


Lithography Process Station 2

Description

Tool group for photolithography processing: manual photoresist spin-coating and soft-bake, exposure, and developing.

Features

  • Solitec resist spinner
  • Solitec vacuum hot plate
  • Wetdeck for resist developing
  • Tooling for small pieces up to 4" wafers


Facebooktwittergoogle_pluslinkedinFacebooktwittergoogle_pluslinkedin