GLAD System #1 (Dagda)


GLAD System #1 (Dagda)

Features

  • Electron-beam evaporation (single pocket)
  • Materials: Oxides, metals (reviewed on case-by-case basis)
  • Reactive evaporation (reviewed on case-by-case basis)
  • Dual-axis substrate motion: tilt (α) and azimuthal rotation (φ)
  • Adjustable deposition pressure (variable position gate valve & MFCs)
  • Typical base pressure: 4.6e-8 Torr (weekend pumpdown)


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