GLAD System #1 (Dagda)


GLAD System #1 (Dagda)

Features

  • Technique:
  • Electron Beam Evaporation (single pocket preferred)
  • Materials:
  • Oxides, metals (reviewed on case by case basis)
  • Notes:
  • Dual Axis Substrate Rotation
  • Reactive Evaporation (reviewed on case by case basis)
  • Adjustable deposition pressure (variable position gate valve & MFC's)
  • Sputter gun currently disabled (1")
  • BP: 4.6 x 10-8 Torr (weekend pumpdown)


Facebooktwittergoogle_pluslinkedinFacebooktwittergoogle_pluslinkedin