nanoFAB News

• Overnight Shutdown
  July 21, 2009
  Due to a scheduled repair of our Liquid Nitrogen Holding tank, we will be shutting down a…
• Mandatory Training Course
  July 17, 2009
  Our mandatory training course is currently being modified.  We will be offering a single 2 hour training…
• Canada Day at the NanoFab
  June 29, 2009
  July 1st is a statutory holiday, nanoFAB access will be as per our “after hours access” policy. 
• UV / DUV mask aligner back in UV mode
  June 22, 2009
  Our UV / DUV mask aligner (Elmo) is now back in UV mode. DUV is still available…
• Equipment Shutdown Notice
  June 18, 2009
  Due to maintenance on the building vacuum system the following equipment will be unavailable on Monday June…
• Piranha Deck Down
  June 10, 2009
  The Piranha Aisle 2 wet deck is down to enable maintenance to the exhaust system.
• Clean Room Storage Boxes
  June 2, 2009
  As part of the ongoing installation of the Alcatel AMS110, we have temporarily moved the storage boxes…
• Pattern Generator Maintenance
  June 1, 2009
  The Heidelberg Pattern Generator will be placed offline from June 12 – 22 for routine maintenance. 
• DUV installed on Mask Aligner #2
  May 21, 2009
  We’ve recently setup Mask Aligner #2 (Elmo) into it’s “DUV” configuration (254nm).   Normally, this system exposes subtrates…
• E-Beam Lithography Training
  May 13, 2009
  Training for the Raith 150 EBL System has now been scheduled.