nanoFAB News
- NanoFab Introductory Training Course – May 5, 2010
April 29, 2010
We will be offering our Introductory Safety Course at 1PM on Wednesday, May 5/10. The course has… - DUV Lithography Processing at the NanoFab
April 20, 2010
Our middle optical mask aligner (Elmo) will be kept as a DUV aligner. This means that the… - More Optical Lithography Qualification Information
April 20, 2010
One of the critical items in doing more than one layer lithography is how accurately the second… - Cleanroom closure – Wednesday April 14/10
April 12, 2010
The U of A trades will be performing fan maintenance that will require a temporary shutdown of… - STS ICPRIE is operational
March 25, 2010
Some news a lot of you have been waiting for, the STS ICPRIE system is back up… - Reminder: Introductory Training Course, March 3/2010 – 1PM
March 1, 2010
We will be offering our Introductory Safety Course at 1PM on Wednesday, March 3/10. The course has… - Researcher awarded NSERC funding for NanoFab project
February 26, 2010
Congratulations to Dr. Fedosejevs who has been awarded research funding for his alternative energy project. He has… - Mask Aligner DUV mode
February 12, 2010
The UV/DUV mask aligner (Elmo) has been changed over to DUV (254nm). As of February 15th it… - Equipment Upgrade – Photomask Cleaning Station
February 8, 2010
We’ve recently upgraded our photomask cleaning station. We have just finished installing a much more modern and… - DI Water Shutdown – Friday, Feb. 5/10
February 2, 2010
As part of our ongoing Deionized Water plant upgrade, there will be a shutdown of the DI…