nanoFAB News


  • Raith 150-2 Operational
    July 22, 2009
    A maintenance and service visit has just been completed on the 150-2 EBL system.   This tool is…
  • Overnight Shutdown
    July 21, 2009
    Due to a scheduled repair of our Liquid Nitrogen Holding tank, we will be shutting down a…
  • Mandatory Training Course
    July 17, 2009
    Our mandatory training course is currently being modified.  We will be offering a single 2 hour training…
  • Canada Day at the NanoFab
    June 29, 2009
    July 1st is a statutory holiday, nanoFAB access will be as per our “after hours access” policy. 
  • UV / DUV mask aligner back in UV mode
    June 22, 2009
    Our UV / DUV mask aligner (Elmo) is now back in UV mode. DUV is still available…
  • Equipment Shutdown Notice
    June 18, 2009
    Due to maintenance on the building vacuum system the following equipment will be unavailable on Monday June…
  • Piranha Deck Down
    June 10, 2009
    The Piranha Aisle 2 wet deck is down to enable maintenance to the exhaust system.
  • Clean Room Storage Boxes
    June 2, 2009
    As part of the ongoing installation of the Alcatel AMS110, we have temporarily moved the storage boxes…
  • Pattern Generator Maintenance
    June 1, 2009
    The Heidelberg Pattern Generator will be placed offline from June 12 – 22 for routine maintenance. 
  • DUV installed on Mask Aligner #2
    May 21, 2009
    We’ve recently setup Mask Aligner #2 (Elmo) into it’s “DUV” configuration (254nm).   Normally, this system exposes subtrates…