The STS ICP-RIE has been switched back to 100mm mode and is available for use.
STS ICP-RIE Back to 100mm Mode
on August 23, 2012
- General Info
Founded in 1999, the nanoFAB has grown to become one of the premier micro & nanofabrication facilities in Canada.
- User Info
Open access facility - available for use by researchers and industry across the country.
- Services
High-quality photomask fabrication, characterization services, and process application support.
- Capabilities
Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.
- News
Announcements about a range of topics in and around the nanoFAB.