All nanoFAB HVAC systems have returned to normal. The repair was complete mid-day on Wednesday and facility conditions appear to have returned to normal.
A key part of the HVAC system failed early this morning. At present, we are unable to control the space pressure, humidity or temperature. We are currently allowing processing to continue, but please be aware that the cleanroom is not performing normally. Some sensitive processes (such as litho or bonding) may not be advisable until these issues are resolved.
The U of A trades are working on repairing the unit, and our hope is that the system is running tomorrow sometime. Any questions, please contact a staff member.