DUV Lithography Processing at the NanoFab

Our middle optical mask aligner (Elmo) will be kept as a DUV aligner. This means that the wavelength of the mask aligner will be kept at 254 nm. We have a number of users who need this wavelength and very few users, who use this mask aligner for ‘normal’  wavelengths. Given the cost of a DUV bulb ($1000) and the lack of desire to change the bulb to UV, we will only change the bulb to UV only if requested.