Founded in 1999, the nanoFAB has grown to become one of the premier micro & nanofabrication facilities in Canada.
Open access facility - available for use by researchers and industry across the country.
High-quality photomask fabrication, characterization services, and process application support.
Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.
Announcements about a range of topics in and around the nanoFAB.
Our middle optical mask aligner (Elmo) will be kept as a DUV aligner. This means that the wavelength of the mask aligner will be kept at 254 nm. We have a number of users who need this wavelength and very few users, who use this mask aligner for ‘normal’ wavelengths. Given the cost of a DUV bulb ($1000) and the lack of desire to change the bulb to UV, we will only change the bulb to UV only if requested.
