Our UV / DUV mask aligner (Elmo) is now back in UV mode. DUV is still available by special request.
UV / DUV mask aligner back in UV mode
on June 22, 2009
- General Info
Founded in 1999, the nanoFAB has grown to become one of the premier micro & nanofabrication facilities in Canada.
- User Info
Open access facility - available for use by researchers and industry across the country.
- Services
High-quality photomask fabrication, characterization services, and process application support.
- Capabilities
Full range of fabrication capabilities from CAD design, through deposition, lithography, etch, characterization, and packaging.
- News
Announcements about a range of topics in and around the nanoFAB.