This manual is addressed to all nanoFAB users and outlines administrative policies and safety procedures that must be followed. The nanoFAB is committed to providing a safe working environment for all staff, users, and visitors. For your own safety and the safety of others, you should read this manual carefully and observe the procedures.
Any questions or concerns should be directed towards a nanoFAB staff member either by email or through an online user form.
- Process-Spec_2023_Edmonton.docx-1.pdf (45 downloads)
- Process-Spec_2023_Edmonton.docx.pdf (34 downloads)
- NRC-Microscopy Characterization Technician.pdf (40 downloads)
- Job-Description-Nanofabrication-Engineer.pdf (293 downloads)
- MEMS_Process_Technologist.pdf (236 downloads)
- NANOFABRICATION-SCIENTIST-ENGINEER-Dec-2022.pdf (67 downloads)
- Cleanroom-Technician-Applied-Nanotools-Sept-2022-2.pdf (76 downloads)
- Cleanroom-Technician-Applied-Nanotools-Sept-2022.pdf (73 downloads)
- MEMS-Process-Engineer_Job-Post_Sheba.pdf (83 downloads)
- PlasmaTherm-Newspost.docx (75 downloads)
- posting.pdf (135 downloads)
- 11978_Poster_BIL.pdf (128 downloads)
- 11978_Poster_BIL.docx (116 downloads)
- MEMS-Engineer_Sheba-Microsystems.pdf (2272 downloads)
- 100-micron-aperture-100-micron-step-on-big-feature.jpg (163 downloads)
- AZ 1500 series baseline recipes (788 downloads)
- AZ 1500 series datasheet (385 downloads)
- ZEISS-Seminar-Flyer-March-6-2018.pdf (219 downloads)
- memsstar HF Vapour Etcher SOP (378 downloads)
- UV Flood Exposure System (Sunny) SOP (414 downloads)
- Sputtering System #3 (Floyd) SOP (513 downloads)
- SUSS MABA6 chuck diagrams (400 downloads)
- Sample Submission Procedure (695 downloads)
- Guide to using WinSCP (590 downloads)
- Temporary wafer bonding using Crystalbond (427 downloads)
- KOH etching of bulk silicon (1669 downloads)
- Si DRIE using the Oxford Estrelas (649 downloads)
- nanoFAB Glass Microfluidic Device Fabrication Manual (542 downloads)
- nanoFAB Capabilities Brochure (253 downloads)
- Plasma cleaner SEM results. (235 downloads)
- nanoFAB Seminar Series-27JAN15 (250 downloads)
- Microscopy Workshop Program (966 downloads)
- MiniBrute Furnace SOP (3640 downloads)
- PECVD SOP (918 downloads)
- Brewer Spinner and Hotplate SOP (971 downloads)
- Spectrophotometer SOP (3684 downloads)
- ABM Mask Aligner 220nm Total (536 downloads)
- Gomez SOP (1024 downloads)
- Flexus Stess Measurement tool SOP (851 downloads)
- Bob Sputtering Tool SOP (1233 downloads)
- Doug Sputtering Tool SOP (972 downloads)
- ABM Mask Aligner 365nm_405nm Total (196 downloads)
- ABM Mask Aligner 405nm Total (168 downloads)
- XeF2 Etch Characterizations (1716 downloads)
- LOR5B HPR504 Bilayer (2670 downloads)
- AZ 5214 Recipe (6910 downloads)
- PMMA EBL Lift Off Procedure (6132 downloads)
- Raith 150-2 SOP (3974 downloads)
- Raith 150-Two NanoSuite Software Operation Manual (5044 downloads)
- HSQ Spin Curves (5020 downloads)
- ZEP Exposure Results (3539 downloads)
- Raith 150-TWO Beam Currents (393 downloads)
- KOH and TMAH Etching of Bulk Silicon (21792 downloads)
- ABM Mask Aligner 365nm Total (314 downloads)
- ABM Mask Aligner 254nm Total (3286 downloads)
- HPR 504 Recipe (5823 downloads)
- Branson Barrel Etcher SOP (4285 downloads)
- Optical Lithography Tips (5295 downloads)
- ZEP Spin Curve (4505 downloads)
- Disco Dicing Saw SOP (5893 downloads)
- MiniBrute Oxidation Curves (3390 downloads)
- Guide to PhotoMask Fabrication (18188 downloads)
- Photomask Cleaning Station SOP (3635 downloads)
- NanoFab - CityTV (m4v - lo) (1328 downloads)
- NanoFab - CityTV (m4v - Hi) (1267 downloads)
- NanoFab - CityTV (mov - Hi) (1480 downloads)
- Maximum Achievable Aspect Ratio in Si DRIE (4691 downloads)
- Parylene Deposition SOP (4460 downloads)
- Doping & Ion Implantation (Non-Traditional) (3034 downloads)
- Doping & Ion Implantation (Boron & Phosphorous) (3176 downloads)
- Zygo Optical Profilometer (4433 downloads)
- Parylene Types and Deposition Rates (4443 downloads)
- Parylene Adhesion Promotion (4398 downloads)
- VASE SOP (4127 downloads)
- SU-8 Recipe (4164 downloads)
- HPR 506 Recipe (4620 downloads)
- AZ P4620 Recipe (8218 downloads)
- Micro-Etch RIE SOP (4735 downloads)
- XeF2 SOP (4323 downloads)
- Aluminum Etch SOP (4667 downloads)
- HF Etching SOP (5257 downloads)
- Gold Etch SOP (5170 downloads)
- UV / Ozone Bonder SOP (3234 downloads)
- Trion RIE SOP (4645 downloads)
- Critical Point Drier SOP (4145 downloads)
- Buying SOI Wafers (4758 downloads)
- Piranha SOP (1477 downloads)
- Chrome Etch SOP (4912 downloads)
- Headway Spinner - SOP (4558 downloads)
- YES Oven (HMDS #1) SOP (598 downloads)
- ABM Mask Aligner SOP (6698 downloads)
- PDMS Silane SOP (11798 downloads)
- Boxed PDMS (11842 downloads)
- Evacuation Map Suss and Furnace Area (4468 downloads)
- Evacuation Map Litho Wetetch Area (4910 downloads)
- Evacuation Map Oxford & STS Area (3482 downloads)
- Evacuation Map 10k Area (4548 downloads)
- Evacuation Map Master (5099 downloads)
